In order to analyze the effect of proceeding on the mechanical and tribological properties of DLC films.We prepared thre......

Diamond-like carbon films have received considerable interest for more than a decade because of their excellent tribolog......

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用双离子束溅射法在50℃以下的玻璃基片上淀积了类金刚石碳(DLC)膜.研究了轰击离子能量、轰击离子束流密度及轰击源内氢/氩流量比......

以微波激励氙（Ｘｅ）发射的真空紫外（ＶＵＶ）光作光源，乙炔（Ｃ２Ｈ２）作反应气体，氮（Ｎ２）、氩（Ａｒ）和氢（Ｈ２）气为稀释气体，采用直接光化学汽相淀积（ＣＶＤ）工艺，在硅（Ｓｉ）、钼（Ｍｏ）及玻璃衬底上进行......

用双离子束溅射法在５０℃以下的基底上淀积了类金刚石（ＤＬＣ）膜。对ＤＬＣ膜采用扫描电子显微镜、透射电子显微镜及拉曼谱仪进行了结构分析。通过对......

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